High quality single-walled carbon nanotube synthesis using remote plasma CVD

Single-walled carbon nanotube (SWNT) forest synthesis using antenna-type remote plasma chemical vapor deposition (ARPCVD) is presented. A series of synthesis using carbon monoxide gas as carbon feedstock reveals that the remote conditions, in other words, distance between an antenna and a substrate affects the quality of nanotube significantly. That is, far distance geometry on ARPCVD creates high-quality SWNTs. It motivates us to use same methodology for the synthesis using CH4/H2 previously proven to make long SWNT forests. Finally, along the methodology, we achieve to make SWNT forest with high-quality and small diameter successfully. This study offers an important suggestion to embody SWNT forests with both length and quality using remote plasma CVD.

► Single-walled carbon nanotube (SWNT) synthesis using a remote-plasma chemical vapor deposition.
► The synthesis using carbon monoxide gas as carbon feedstock.
► Remote condition affects the quality of nanotube significantly.
► By keeping far distance geometry on the condition, SWNTs with high-quality and small diameter are synthesized.