Modeling and numerical analyses of microwave plasmas for optimizations of a reactor design and its operating conditions

A model of MW plasmas has been developed, which prescribes distributions of electron temperature as well as electron number density under self-consistent electromagnetic field. In the proposed model, an energy balance equation is algebraically solved, and only electron continuity equation is essentially coupled to the Maxwell equations. Preliminary simulations are carried out and the results are compared with corresponding results obtained by using other model.