کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
702472 1460823 2005 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Influence of technological conditions on mechanical stresses inside diamond-like carbon films
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی برق و الکترونیک
پیش نمایش صفحه اول مقاله
Influence of technological conditions on mechanical stresses inside diamond-like carbon films
چکیده انگلیسی

In this paper the influences of the technological conditions, i.e. the influences of the hydrogen flow rate and deposition time, on the values of the intrinsic mechanical stresses inside the diamond-like carbon (DLC) thin films prepared by plasma enhanced chemical vapor deposition onto silicon substrates are studied. These stresses are measured by two-beam interferometry and optical profilometry based on chromatic aberration through the measurements of deformations of the silicon substrates originating in consequence of the film stresses. It is shown that the influence of the deposition time (i.e. film thickness) on the film stress is relatively slight in contrast to the influence of the hydrogen flow rate on this quantity. It is namely shown that the film stresses are influenced by the hydrogen flow rate values in a pronounced way within the interval of interest, i.e. within the interval 1–7 sccm. Moreover, it is shown that the method of optical profilometry used can be competitive to the method of two-beam interferometry from the practical point of view.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Diamond and Related Materials - Volume 14, Issues 11–12, November–December 2005, Pages 1835–1838
نویسندگان
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