کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
702655 1460812 2010 20 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Status review of the science and technology of ultrananocrystalline diamond (UNCD™) films and application to multifunctional devices
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی برق و الکترونیک
پیش نمایش صفحه اول مقاله
Status review of the science and technology of ultrananocrystalline diamond (UNCD™) films and application to multifunctional devices
چکیده انگلیسی

This review focuses on a status report on the science and technology of ultrananocrystalline diamond (UNCD) films developed and patented at Argonne National Laboratory. The UNCD material has been developed in thin film form and exhibit multifunctionalities applicable to a broad range of macro to nanoscale multifunctional devices. UNCD thin films are grown by microwave plasma chemical vapor deposition (MPCVD) or hot filament chemical vapor deposition (HFCVD) using new patented Ar-rich/CH4 or H2/CH4 plasma chemistries. UNCD films exhibit a unique nanostructure with 2–5 nm grain size (thus the trade name UNCD) and grain boundaries of 0.4–0.6 nm for plain films, and grain sizes of 7–10 nm and grain boundaries of 2–4 nm when grown with nitrogen introduced in the Ar-rich/CH4 chemistry, to produce UNCD films incorporated with nitrogen, which exhibit electrical conductivity up to semi-metallic level. This review provides a status report on the synthesis of UNCD films via MPCVD and integration with dissimilar materials like oxides for piezoactuated MEMS/NEMS, metal films for contacts, and biological matter for a new generation of biomedical devices and biosensors. A broad range of applications from macro to nanoscale multifunctional devices is reviewed, such as coatings for mechanical pumps seals, field-emission cold cathodes, RF MEMS/NEMS resonators and switches for wireless communications and radar systems, NEMS devices, biomedical devices, biosensors, and UNCD as a platform for developmental biology, involving biological cells growth on the surface. Comparisons with nanocrystalline diamond films and technology are made when appropriate.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Diamond and Related Materials - Volume 19, Issues 7–9, July–September 2010, Pages 699–718
نویسندگان
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