Structure and characterization of the multilayered Ti-DLC films by FCVA

This work presents a simple approach for the synthesis of multilayered titanium-diamond-like carbon (multilayered Ti-DLC) films on a Si substrate by a filtered cathodic vacuum arc (FCVA) system using Ti-coated graphite target to supply carbon as well as the dopant titanium. This study focuses on the characterization of microstructure, surface roughness, mechanical strength and electrical resistivity. The results indicated that the multilayered Ti-DLC films exhibit better mechanical properties than the Ti-free and Ti-implanted DLC films, and both multilayered Ti- and Ti-implanted DLC films have similar Ti atomic concentrations. The surface roughness of the multilayered Ti-DLC films shows a value much lower than the other films. The film microstructure consists in TiC nanocrystals precipitated in the amorphous carbon matrix with a multilayered structure. Because of the high hardness and low roughness, the multilayered Ti-DLC films can be used as biomedical, wear-resistant and solid lubricant coatings.