Different nanostructures identified in boron nitride thin films grown on Si (100) by rf magnetron sputtering

Boron nitride (BN) thin films grown on Si (100) substrates by radio frequency magnetron sputtering, with varying growth parameters, are studied by high-resolution transmission electron microscopy (HRTEM). The HRTEM study reveals the presence of several interesting nanostructures in the BN films. Nanotube-like configurations, nanoarches and nanohorns are observed, as well as well-orientated cubic BN nanocrystals. It is found that several configurations of the turbostratic BN planes (properly orientated or curved) can act, in the same film, as nucleation sites for the growth of the cubic phase.