کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
703144 | 891127 | 2007 | 6 صفحه PDF | دانلود رایگان |

Gauge factors of boron-doped polycrystalline diamond films were investigated in the ranges from room temperature to 500 °C and from 0 to 0.07 MPa of applied pressure. A VCR fitting was used as a package for a measurement at high temperature. Undoped and boron-doped polycrystalline diamond films were deposited on a Si substrate by hot filament chemical vapor deposition (CVD) method. A chip was fabricated with bulk micro machining technique. The gauge factors were evaluated in the ranges from room temperature to 500 °C in furnace. The calculated values of the gauge factors were found to vary in a range of 5–241. The gauge factors decreased with increased temperature from room temperature to around 100–300 °C. However, with higher temperature up to 500 °C, it increased.
Journal: Diamond and Related Materials - Volume 16, Issue 8, August 2007, Pages 1670–1675