کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
703189 891128 2006 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Characterization of silicon films grown by atomic layer deposition on nanocrystalline diamond
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی برق و الکترونیک
پیش نمایش صفحه اول مقاله
Characterization of silicon films grown by atomic layer deposition on nanocrystalline diamond
چکیده انگلیسی

Ultrathin silicon films were deposited on nanocrystalline diamonds by means of atomic layer deposition (ALD) from gaseous monosilane. The silicon deposition was achieved through the sequential reaction of SiH4 saturated adsorption and in-site pyrogenation. X-ray diffraction (XRD), transmission electron microscopy (TEM), high-resolution electron microscopy (HREM) and Fourier transform infrared (FTIR) spectra were utilized to investigate the structure and the morphology of Si-coated nanocrystalline diamonds. The results confirmed that continuous silicon films were successfully deposited on both basal planes and edges of nanocrystalline diamond particles by this ALD method and the structure of the film was mainly determined by deposition temperature and deposition cycle.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Diamond and Related Materials - Volume 15, Issue 9, September 2006, Pages 1434–1437
نویسندگان
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