کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
703459 1460817 2008 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Hydrogen incorporation, bonding and stability in nanocrystalline diamond films
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی برق و الکترونیک
پیش نمایش صفحه اول مقاله
Hydrogen incorporation, bonding and stability in nanocrystalline diamond films
چکیده انگلیسی

The hydrogen concentration in hot filament and microwave plasma CVD nanocrystalline diamond films is analysed by secondary ion mass spectrometry and compared to the film grain size. The surface and bulk film carbon bonds are analysed respectively by X-ray photoelectron spectroscopy (XPS) and ultra-violet Raman spectroscopy. XPS results show the presence of the hydrogenated p-type surface conductive layer. The respective intensities of the 1332 cm− 1 diamond peak, of the G and D bands related to sp2 phases, and of the 3000 cm− 1 CHx stretching mode band, are compared on Raman spectra. The samples are submitted to thermal annealing under ultra-high vacuum in order to get hydrogen out-diffusion. XPS analysis shows the surface desorption of hydrogen. Thermal annealing modifies the sp2 phase structure as hydrogen out diffuses.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Diamond and Related Materials - Volume 17, Issues 7–10, July–October 2008, Pages 1127–1131
نویسندگان
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