High-selectivity anisotropic etching of single-crystal diamond by H plasma using iron catalysis

High-selectivity anisotropic etching of single-crystal diamond by H plasma using iron catalysis

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Diamond and Related Materials - Volume 86, June 2018, Pages 186-192

Kang Liu, Zhijun Lv, Bing Dai, Guoyang Shu, Jiwen Zhao, Benjian Liu, Weihua Wang, Jingjing Xue, Kaili Yao, Mingqi Sun, Ge Gao, Yang Wang, Jiaqi Zhu,