Low temperature hot filament chemical vapor deposition of Ultrananocrystalline Diamond films with tunable sheet resistance for electronic power devices

Low temperature hot filament chemical vapor deposition of Ultrananocrystalline Diamond films with tunable sheet resistance for electronic power devices

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Diamond and Related Materials - Volume 69, October 2016, Pages 207-213

J.J. Alcantar-Peña, J. Montes, M.J. Arellano-Jimenez, J.E. Ortega Aguilar, D. Berman-Mendoza, R. García, M.J. Yacaman, O. Auciello,