A comparative study of direct current magnetron sputtering and high power impulse magnetron sputtering processes for CNx thin film growth with different inert gases

A comparative study of direct current magnetron sputtering and high power impulse magnetron sputtering processes for CNx thin film growth with different inert gases

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Diamond and Related Materials - Volume 64, April 2016, Pages 13-26

Susann Schmidt, Zsolt Czigány, Jonas Wissting, Grzegorz Greczynski, Erik Janzén, Jens Jensen, Ivan Gueorguiev Ivanov, Lars Hultman,