Factors to control uniformity of single crystal diamond growth by using microwave plasma CVD

Growth condition to realize (non-)uniform growth condition is specified experimentally. Conventional theories are compared with the experimentally obtained growth rates, which well explain the absolute values of the growth rate in the central regions but fails to describe the (non-)uniformity. Possible revised formula to explain the experimentally obtained (non-)uniformity based on the micro- and macroscopic simulations is proposed.