کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
7223028 1470556 2018 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Formation of GaN thin film on silicon substrate by gallium oxide ammoniation
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی (عمومی)
پیش نمایش صفحه اول مقاله
Formation of GaN thin film on silicon substrate by gallium oxide ammoniation
چکیده انگلیسی
Gallium Nitride (GaN) thin film was successfully grown by ammoniation of the chemically vapour deposited Gallium oxide (Ga2O3) through the nitridation process. Ga2O3 was deposited on silicon substrate using simple vapor deposition method in a tubular furnace. The nitridation of the deposited layer was achieved at low temperature of 1273 K. The structural, optical, morphological and electrical properties of the as grown GaN thin film was studied by X-ray diffraction, SEM, AFM, Photoluminescence and I-V characteristics. The result revels that the grown thin film have a wurtzite crystal structure with a layer thickness of ∼5 μm and roughness of about 0.3 nm. Photoluminescence spectra show broad emission peak with various peaks associated in it. Corresponding I-V characteristics of the GaN schottky diode was recorded and the ideality factor was calculated. Photo response of the fabricated diode was also recorded.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Optik - Volume 171, October 2018, Pages 51-57
نویسندگان
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