On the calibration of surface plates

Calibration of large surface plates could be performed using different measuring systems. In this investigation an autocollimator system, a laser system and a coordinate measuring machine have been investigated. A comparison among these methods of calibration has been carried out. An Elcomat 3000 autocollimator of resolution 0.05 arcsecond, an Agilent 5529A laser interferometer system of resolution 0.05 arcsecond and a Prismo/Zeiss Computerized Numerically Controlled Coordinate Measuring Machine (CNC–CMM) respectively are used. Large reflecting mirror, angular retro reflector and sensitive probe are used with autocollimator, laser systems and CNC–CMM respectively to identify heights at each position on the tested surface plate. Repeated results from the different methods are carried out and presented in the paper. Uncertainties associated with the measurement results of each method have been estimated using the GUM procedures and given in the paper. The paper discusses the difficults and ease as well as accuracies associated with each method.

► The paper compares flatness measurement results for three different techniques.
► Precise autocollimator, laser interferometer and CNC–CMM systems are investigated.
► The mean measured flatness deviations are found to be insignificantly different.
► CNC–CMM comes faster while autocollimator and laser systems are portable.
► Practice showed that the alignment and adjustment of the autocollimator systems are easy.