MEMS in-plane motion/vibration measurement system based CCD camera

We report on the development of a vibrometer for in-plane motion which is particularly suitable for Micro Electro Mechanical System (MEMS) samples. The system combines a conventional microscope, coherent electronics and a Full Frame CCD camera. Stroboscope lighting allows the system to freeze the motion. The obtained images correspond to different phases of the sample motion. Different subpixel motion measurement algorithms are compared in terms of precision and computation time. An algorithm that we specially design for this application proved to be the best. It is based on the shift Fourier theorem and uses first harmonics, where most energy is present. Thus the system allows computing the phase and magnitude of the sample displacement. With the system we can obtain a measurement resolution of 100 pm demonstrated on the AFM cantilever vibrations measurement. The effect of the edge roughness was studied. It decreases the performance of the algorithm but roughness is very low on most MEMS applications. This method based on a CCD camera, is very well suited for measuring in-plane MEMS vibration since it does not require surface roughness for scattering the light as with the speckle methods (for example). It can quickly obtain full field motion, with a high precision. Furthermore, the used algorithm is simple, fast and very noise insensitive.

► We report on the development of a vibrometer for in-plane motion.
► It uses a full field camera and is designed for MEMS.
► Conventionnal sub-pixel algorithms and a new one are compared.
► This especially designed one is as precise (100 pm) and quicker.