کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
731314 | 893047 | 2013 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
A comparison of digital holographic microscopy and on-axis phase-shifting interferometry for surface profiling
دانلود مقاله + سفارش ترجمه
دانلود مقاله ISI انگلیسی
رایگان برای ایرانیان
کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
کنترل و سیستم های مهندسی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: A comparison of digital holographic microscopy and on-axis phase-shifting interferometry for surface profiling A comparison of digital holographic microscopy and on-axis phase-shifting interferometry for surface profiling](/preview/png/731314.png)
چکیده انگلیسی
• The aim is a comparison of digital holographic microscopy and on-axis phase-shifting.
• The object is a height-step of 1.34 μm nominally.
• The stability against the environmental disturbance has been assessed.
• The repeatability of the setup has been tested.
This paper presents a quantitative comparison between off-axis digital holographic microscopy (DHM) and on-axis phase-shifting interferometry (PSI) for surface micro topography measurement. The comparison has been applied on an object of a 1.34 μm nominal step height. The experimental results show that single shot, dual-wavelength, off-axis DHM surpasses on dual-wavelength, on-axis PSI in terms of accuracy and repeatability.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Measurement - Volume 46, Issue 10, December 2013, Pages 4121–4126
Journal: Measurement - Volume 46, Issue 10, December 2013, Pages 4121–4126
نویسندگان
D.G. Abdelsalam,