Evolutionary algorithm based feedforward control for contouring of a biaxial piezo-actuated stage

The main objective of this paper is to establish a precision contouring control of a biaxial piezoelectric-actuated stage. The positioning accuracy of the piezoelectric-actuated stage is limited due to the hysteretic nonlinearity of the piezoelectric actuators (PEA). To compensate this hysteresis problem, a feedforward controller based on an evolution algorithm is proposed. The dynamics of the hysteresis is formulated by the Bouc–Wen model and the evolutionary algorithms (EAs) are studied to identify the optimal parameters of the Bouc–Wen model. To verify the consistency, two micro-contouring tasks are implemented by the proposed feedforward controller with the feedback of linear optical scales in DSP based real-time control architecture.