کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
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737458 | 1461897 | 2013 | 4 صفحه PDF | دانلود رایگان |
We demonstrate the feasibility of developing a low-cost, rugged, miniaturized ruthenium oxide (RuO2) thin-film pH sensor comprising a RuO2 on platinum sensing electrode deposited using R.F. magnetron sputtered in conjunction with an integrated thick Ag/AgCl reference electrode. A RuO2 thin-film (300 nm) is deposited on an alumina substrate using R. F. magnetron sputtering with a RuO2 sputtering target in Argon plasma. Experimental results show a linear pH sensitivity of 58.50 mV/pH when the developed sensor is immersed in a standard buffer solution having pH values of 4.0 and 10.0 and lab supply water of pH 7.7 at a temperature of 22 °C. These results are in excellent agreement with the theoretical Nernstian response of 58.56 mV/pH at 22 °C.
Journal: Sensors and Actuators A: Physical - Volume 203, 1 December 2013, Pages 300–303