کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
737593 | 1461926 | 2012 | 10 صفحه PDF | دانلود رایگان |

Thick films of Nb-doped lead zirconate titanate (PZT) on bare silicon (Si) wafers were prepared by electrophoretic deposition (EPD) in ethanol-based suspensions. Alloyed Al/Si ohmic contacts were used for electrical connections. EPD on bare Si wafers was obtained with similar results to metallic substrates, at nominal electric fields between 4350 and 10900 V m−1. Well-adhered and crack-free green films were obtained after solvent evaporation. Sintering of green PZT films was performed at either 850 °C or 950 °C for 1 h. Sintered PZT films on Si featured sharp Si/PZT interfaces and a good degree of crystallinity. Possible applications of sintered PZT/Si structures as on-chip sensors are discussed, taking into account relevant literature results.
► Silicon/PZT stacked structures by electrophoretic deposition (EPD).
► EPD of PZT on bare silicon wafers without metallization.
► Sharp and well-adhered sintered PZT/Si interfaces were produced at 850 °C and 950 °C.
► PZT crystallinity and PZT/Si interface structure depend on sintering temperature.
Journal: Sensors and Actuators A: Physical - Volume 174, February 2012, Pages 123–132