BaTiO3–CuO sputtered thin film for carbon dioxide detection

BaTiO3–CuO films are obtained by RF magnetron sputtering on Si and alumina substrates and annealed at different temperatures in order to check their structural characteristics and also to test their electrical behaviour by means of impedance measurements under different CO2 concentrations (0–2000 ppm). Pt and Ag are tested as electrode materials and the influence of Ag as surface and multilayer additive for sensor response enhancement is also studied.