کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
746718 894473 2008 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Thin-film thickness profile measurement using wavelet transform in wavelength-scanning interferometry
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی برق و الکترونیک
پیش نمایش صفحه اول مقاله
Thin-film thickness profile measurement using wavelet transform in wavelength-scanning interferometry
چکیده انگلیسی

We proposed a new method for retrieving the phase from wavelength-scanning interferogram by wavelet transform. We demonstrate, with both theoretical and experimental data, that this method provides a reliable technique for retrieving phase in the wavelength-scanning interferometry. We show that the proposed method by wavelet transform can reconstruct the nonlinear phase better than the conventional Fourier transform and direct spectral phase calculation method by simulation. The patterned thin film is measured to get the thickness and surface profile simultaneously with the developed wavelength-scanning interferometry.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Optics and Lasers in Engineering - Volume 46, Issue 2, February 2008, Pages 179–184
نویسندگان
, , , , ,