کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
746718 | 894473 | 2008 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Thin-film thickness profile measurement using wavelet transform in wavelength-scanning interferometry
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
مهندسی برق و الکترونیک
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
We proposed a new method for retrieving the phase from wavelength-scanning interferogram by wavelet transform. We demonstrate, with both theoretical and experimental data, that this method provides a reliable technique for retrieving phase in the wavelength-scanning interferometry. We show that the proposed method by wavelet transform can reconstruct the nonlinear phase better than the conventional Fourier transform and direct spectral phase calculation method by simulation. The patterned thin film is measured to get the thickness and surface profile simultaneously with the developed wavelength-scanning interferometry.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Optics and Lasers in Engineering - Volume 46, Issue 2, February 2008, Pages 179–184
Journal: Optics and Lasers in Engineering - Volume 46, Issue 2, February 2008, Pages 179–184
نویسندگان
Young-Min Hwang, Sung-Won Yoon, Jung-Hwan Kim, Souk Kim, Heui-Jae Pahk,