Micro-supercapacitors from carbide derived carbon (CDC) films on silicon chips

► On-chip micro-supercapacitors were fabricated based on TiC-CDC films. ► TiC-CDC films are pure carbon films without organic binders. ► Micro-supercapacitors were produced based on standard microfabrication steps. ► Ideal capacitive behavior is demonstrated with two types of current collectors. ► Low series resistance was achieved.