کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7833177 | 1503518 | 2018 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Chemical vapor deposition graphene of high mobility by gradient growth method on an 4H-SiC (0â¯0â¯0â¯1) substrate
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Graphene directly grown on an 4H-SiC (0â¯0â¯0â¯1) substrate by chemical vapor deposition was studied: it was shown that Si evaporation process is not completely halted during graphene growth when TGâ¯â¥â¯1400â¯Â°C, the SiC substrate decomposes at the position of graphene coverage. AFM and Raman spectrum results reveal that carbon concentration significantly influences graphene growth rate and morphology/structure. It is found that the quality of graphene film depends on the growth temperature and the flow of carbon source. We develop a new gradient growth method to produce a feasible graphene material for electronic devices. Graphene grown by this method has a flat-morphology structure, low wrinkle density, high crystal quality, good uniformity, and outstanding electrical transport properties. Nitrogen doping has an n-type doping effect on graphene carrier concentration. The main component of nitrogen-bond type is the graphitic configuration. The graphene material with nitrogen doping reaches a record mobility of 9010â¯cm2/V·s by room temperature Hall effect measurement, indicating graphene grown by gradient method with suitable nitrogen doping could yield a high quality film comparable to that by traditional method.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 454, 1 October 2018, Pages 68-73
Journal: Applied Surface Science - Volume 454, 1 October 2018, Pages 68-73
نویسندگان
Qingbin Liu, Cui Yu, Zezhao He, Guodong Gu, Jingjing Wang, Chuangjie Zhou, Jianchao Guo, Xuedong Gao, Zhihong Feng,