کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7833234 | 1503516 | 2018 | 8 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Relation between modulation frequency of electric power oscillation during pulse magnetron sputtering deposition of MoNx thin films
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موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
This work reports the results of a study, concerning the synthesis of molybdenum nitride thin films, by DC Pulsed Magnetron Sputtering method (PMS), operating with 100â¯kHz main frequency, and modulated by the additional frequency, adjustable in the range of 10-1000â¯Hz (modulated Pulse Magnetron Sputtering - mPMS). We have studied the influence of mPMS on the state of plasma using optical emission spectroscopy technique (OES). X-ray photoelectron spectroscopic analysis (XPS) and X-ray diffractometry (XRD) were also used to investigate the relationship between phase composition and modulation frequency of Mo-N thin films. These investigations have revealed a presence of low-temperature phases of β-Mo16N7 and δ-MoN, confirming correlation between chemical state of Mo 3d3/2, 3d5/2 or 3p3/2 and amount of nitrogen incorporation in Mo-N structures. Films' morphology was well examined by scanning electron microscopy (SEM) and consists the nanocrystalline/amorphous domains. From the utilitarian point of view, very good thermal stability, promising mechanical properties being: Hâ¯â¼â¯16â¯GPa, Eââ¯â¼â¯180â¯GPa (NanoTest) and low value of resistivity below 650â¯Î¼Î©cm (4-point probe method) of the Mo-N, predestine them as an effective diffusion barrier in Cu-wired MOSFET structures. Results confirmed that additional modulation frequency should be considered as a significant factor of electric power oscillation during reactive synthesis by means of PMS-based method.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 456, 31 October 2018, Pages 789-796
Journal: Applied Surface Science - Volume 456, 31 October 2018, Pages 789-796
نویسندگان
Bartosz Wicher, RafaÅ Chodun, Katarzyna Nowakowska-Langier, Sebastian Okrasa, Marek TrzciÅski, Krystian Król, Roman Minikayev, Åukasz SkowroÅski, Åukasz Kurpaska, Krzysztof Zdunek,