Combinatorial study of low-refractive Mg-F-Si-O nano-composites deposited by magnetron co-sputtering from compound targets

Combinatorial study of low-refractive Mg-F-Si-O nano-composites deposited by magnetron co-sputtering from compound targets

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 435, 30 March 2018, Pages 170-177

Stefan Mertin, Tony Länzlinger, Cosmin S. Sandu, Jean-Louis Scartezzini, Paul Muralt,