A comparative study on the direct deposition of μc-Si:H and plasma-induced recrystallization of a-Si:H: Insight into Si crystallization in a high-density plasma

A comparative study on the direct deposition of μc-Si:H and plasma-induced recrystallization of a-Si:H: Insight into Si crystallization in a high-density plasma

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 433, 1 March 2018, Pages 285-291

H.P. Zhou, M. Xu, S. Xu, Y.Y. Feng, L.X. Xu, D.Y. Wei, S.Q. Xiao,