Al-Si-N thin films deposited by laser ablation: Effect of plasma parameters on mechanical and optical properties

Al-Si-N thin films deposited by laser ablation: Effect of plasma parameters on mechanical and optical properties

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Materials Research Bulletin - Volume 99, March 2018, Pages 306-313

L.P. Rivera, Enrique Camps, Stephen Muhl, Rafael Basurto, A. Zeinert,