Cross-sectional X-ray nano-diffraction and -reflectivity analysis of multilayered AlTiN-TiSiN thin films: Correlation between residual strain and bi-layer period

Cross-sectional X-ray nano-diffraction and -reflectivity analysis of multilayered AlTiN-TiSiN thin films: Correlation between residual strain and bi-layer period

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Scripta Materialia - Volume 107, October 2015, Pages 153-156

M. Bartosik, M. Arndt, R. Rachbauer, C. Krywka, C.M. Koller, J. Keckes, P.H. Mayrhofer,