Formation of ordered TiO2 nanostructural arrays with tunable shapes by magnetron sputtering method

▶ TiO2 nanostructural arrays are fabricated by annealing the magnetron sputtered Ti on anodic aluminum oxide templates. ▶ The nanotubular array is polycrystalline anatase phase. ▶ The parameters of the porous template influence the shape of the sputtered nanostructure. ▶ The TiO2 nanostructural film is an indirect bandgap semiconductor with oxygen vacancy defects.