Optics Ag-mirror with high volume fraction-SiCp/Al composite-titanium alloy-PbO system glass metal plus dielectric multi-layer films

This paper presents a high volume fraction SiCp/Al composite-titanium alloy-PbO system glass multi-layer films optics Ag-mirror with high reflectivity in a wide wavelength range of 450-1600 nm. Multi-layer films were fabricated using an electron beam vapor deposition system. The measured reflectivity of Ta2O5/SiO2/Ag/Cr metal plus dielectric films optics Ag-mirror could reach up to ≥96%. The mirror was coated by Ti2O5/SiO2/Ag/Cr films and the measured results indicate that the PV (peak-to-valley) value of 0.365λ (λ=632.8nm) was achieved, and the slope deviation error for flat surface was lower than 0.066λ RMS (root mean square). The surface roughness of Ta2O5/SiO2/Ag/Cr multi-layer thin films was 0.744 nm (Ra). The fantasying reflectivity of the current mirror indicates that the mirror can be used as reflector in solid state high energy laser, which requires very high reflectivity of a reflector.