Effect of substrate material selection on polychromatic integral diffraction efficiency for multilayer diffractive optics in oblique incident situation

The effect of substrate material selection for multilayer diffractive optical elements (MLDOEs) on polychromatic integral diffraction efficiency (PIDE) is studied in the oblique incident situation. A mathematical model of substrate material selection is proposed to obtain the high PIDE with large incident angle. The extended expression of the microstructure heights with consideration of incident angle is deduced to calculate the PIDE difference Δη¯(λ) for different substrate material combinations. The smaller value of Δη¯(λ) indicates the more optimal substrate material combination in a wide incident angle range. Based on the deduced mathematical model, different MLDOEs are analyzed in visible and infrared wavebands. The results show that the three-layer DOEs can be applied in larger incident angle situation than the double-layer DOEs in visible waveband. When the two substrate materials are the same, polycarbonate (PC) is more reasonable than poly(methyl methacrylate) (PMMA) as the middle filling optical material for the three-layer DOEs. In the infrared waveband, the PIDE decreases in the LWIR are obviously smaller than that in the MWIR for the same substrate material combination, and the PIDE cannot be calculated when the incident angle larger than critical angle. The analysis results can be used to guide the hybrid optical system design with MLDOEs.