کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7926472 | 1512513 | 2018 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Robust design of broadband EUV multilayer using multi-objective evolutionary algorithm
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
مواد الکترونیکی، نوری و مغناطیسی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Robust design of broadband EUV multilayer using multi-objective evolutionary algorithm Robust design of broadband EUV multilayer using multi-objective evolutionary algorithm](/preview/png/7926472.png)
چکیده انگلیسی
Considering the random fluctuations of the layer thickness, a method of robust design of broadband EUV multilayers based on multi-objective evolutionary algorithm is presented. Owing to the optimization of multi-objective evolutionary algorithm, the optical performance and robust quality of broadband Mo/Si multilayer can be optimized simultaneously, and then a set of robust designs of aperiodic EUV multilayers, which are insensitive to the thickness errors can be obtained in one single simulation run. The robust designs of broadband Mo/Si multilayers could be used to reduce the production risks of EUV mirrors, and this research demonstrates a great potential of application of multi-objective evolutionary algorithm on the design of optical thin film.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Optics Communications - Volume 410, 1 March 2018, Pages 805-810
Journal: Optics Communications - Volume 410, 1 March 2018, Pages 805-810
نویسندگان
Shang-qi Kuang, Xue-peng Gong, Hai-gui Yang,