Conformal titanium nitride in a porous silicon matrix: A nanomaterial for in-chip supercapacitors

Conformal titanium nitride in a porous silicon matrix: A nanomaterial for in-chip supercapacitors

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nano Energy - Volume 26, August 2016, Pages 340-345

Kestutis Grigoras, Jari Keskinen, Leif Grönberg, Elina Yli-Rantala, Sampo Laakso, Hannu Välimäki, Pertti Kauranen, Jouni Ahopelto, Mika Prunnila,