Electron scattering cross-section measurements in ESEM

► Experimental measurements of scattering cross-sections in environmental scanning electron microscopy. ► Theoretical determination of scattering cross sections of gases as a function of accelerating voltage. ► Review of published work regarding scattering cross-sections. ► Scanned beam profiles across a clean edge of a dual Faraday cup provides a satisfactory method to measure electron scattering cross-sections in ESEM.