In situ lift-out dedicated techniques using FIB-SEM system for TEM specimen preparation

► An in situ lift-out technique is used to extract foils from across a local grain boundary in bulk Al alloy and from individual Al atomised powder. ► In conjunction with EBSD, the FIB was used for extracting a foil from a dual-phase Ti-Si alloy for the exploration of orientation relationship between constituent phases. ► It is demonstrated that FIB is more applicable for preparing thin foils from hydrogen-sensitive metals.