کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
8013528 1517168 2018 14 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
A deep understanding of relationship between reverse time and growth of ITO film deposited by direct current pulsed sputtering
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
A deep understanding of relationship between reverse time and growth of ITO film deposited by direct current pulsed sputtering
چکیده انگلیسی
Indium tin oxide (ITO) film was deposited by the traditional direct current (DC) pulsed magnetron sputtering technology. With the increase of reverse time from 0 to 4.0 μs, the crystal structure of ITO film changed from the polycrystalline structure without preferred orientation to (1 0 0) preferred orientation. ITO film with (1 0 0) preferred orientation showed the satisfactory optical and electrical properties, such as the band gap in 4.15 eV and carrier concentration in 4.25 × 1020/cm3. Based on DC pulsed voltage waveform, the formation of (1 0 0) preferred orientation, as well as the change of optical and electrical properties of ITO film, were analyzed logically.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Materials Letters - Volume 220, 1 June 2018, Pages 8-11
نویسندگان
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