کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
8016195 | 1517206 | 2016 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Effect of the vacuum degree on the orientation and the microstructure of β-SiC films prepared by laser chemical vapour deposition
دانلود مقاله + سفارش ترجمه
دانلود مقاله ISI انگلیسی
رایگان برای ایرانیان
کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Effect of the vacuum degree on the orientation and the microstructure of β-SiC films prepared by laser chemical vapour deposition Effect of the vacuum degree on the orientation and the microstructure of β-SiC films prepared by laser chemical vapour deposition](/preview/png/8016195.png)
چکیده انگلیسی
β-SiC films were prepared on AlN substrates by laser chemical vapour deposition (LCVD) using a diode laser and hydrido-polycarbosilane as a precursor at different vacuum degrees. The effect of the vacuum degree on the orientation and the microstructure of the β-SiC films was investigated. The preferred orientation of β-SiC films shifted from (111) to (311), the surface morphologies changed from faceted to rectangular and the columnar cross-section became thicker while increasing the vacuum degree from 0.4 to 7 KPa. The high deposition rate ranged from 180 to 240 µm/h.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Materials Letters - Volume 182, 1 November 2016, Pages 81-84
Journal: Materials Letters - Volume 182, 1 November 2016, Pages 81-84
نویسندگان
Bin Li Bin Li, Qi Li, Hirokazu Katsui, Takashi Goto, Rong Tu,