کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
8023862 | 1517540 | 2018 | 33 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Zr-O-N coatings for decorative purposes: Study of the system stability by exploration of the deposition parameter space
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
The literature about Zr-O-N films reveals a confinement of chemical composition. Therefore, the aim of this work is the exploration of the deposition parameter space in order to evaluate the stability of the Zr-O-N system, i.e. verify if the chemical composition of the films still falls in the same range after variation of different deposition parameters. To do that, a series of Zr-O-N films is deposited first at different reactive flows, maintaining the remaining deposition parameters constant. The obtained films can be classified in three different groups, based on their chemical composition, crystalline structure, and film growth. These groups can be successfully explained according to the sputtering characteristics, and correlated with the mechanical properties and color of the films measured by nanoindentation and spectrophotometry respectively. The films deposited by variation of other parameters are introduced afterwards and their characteristics are compared with the reference series.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 343, 15 June 2018, Pages 30-37
Journal: Surface and Coatings Technology - Volume 343, 15 June 2018, Pages 30-37
نویسندگان
C.I. da Silva Oliveira, D. Martinez-Martinez, L. Cunha, M.S. Rodrigues, J. Borges, C. Lopes, E. Alves, N.P. Barradas, M. Apreutesei,