کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
8023884 1517540 2018 23 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Fabrication of surface acoustic wave based wireless NO2 gas sensor
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Fabrication of surface acoustic wave based wireless NO2 gas sensor
چکیده انگلیسی
Surface acoustic wave (SAW) devices provide a convenient platform for the realization of sensors in the present decade. 99.4 MHz SAW resonator has been fabricated over the ST cut quartz. Subsequently PZT thin film has been deposited by pulsed laser deposition technique as a sensing layer over the fabricated SAW resonator. Shift in resonance frequency was measured precisely for varying concentration of NO2 gas. The calibration curve was found to be linear having a sensitivity of 9.6 Hz/ppm. The fabricated sensor is advantageous for its room temperature, handheld and wireless sensing.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 343, 15 June 2018, Pages 89-92
نویسندگان
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