کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
8023922 1517540 2018 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Growth of nanocolumnar porous TiO2 thin films by magnetron sputtering using particle collimators
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Growth of nanocolumnar porous TiO2 thin films by magnetron sputtering using particle collimators
چکیده انگلیسی
The selective incorporation of deposition species with preferential directionality is analyzed during the growth of TiO2 thin films by magnetron sputtering. Using wisely-designed collimators, tilted nanocolumnar morphologies are grown in a ballistic deposition regime, i.e. when most deposition species arrive at the film surface along well-defined preferential directions, and also in a thermalized deposition regime, when these species follow an isotropic momentum distribution in the plasma gas. The obtained results suggest that the use of particle collimators may promote the growth of porous thin films even in the classical magnetron sputtering configuration, when the target and the substrate are parallel. General insights are given on this approach and, as a proof of concept, its principles applied for the synthesis of nanostructured films in a laboratory-size reactor.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 343, 15 June 2018, Pages 172-177
نویسندگان
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