Effect of chamber pressure on defect generation and their influence on corrosion and tribological properties of HIPIMS deposited CrN/NbN coatings

However, for the coatings deposited at same chamber pressure of 0.35 Pa but with different defect densities (due to the difference in chamber cleanliness), the friction behaviour was directly influenced by the coating defects. The friction co-efficient (μ) decreased by a factor of two from 0.48 to 0.25 when the defect density decreased from 3.18% to 1.37%.