New route to synthesize ZrB2 coatings by reactive chemical vapor deposition method using Zr-BCl3-H2-Ar reagents

New route to synthesize ZrB2 coatings by reactive chemical vapor deposition method using Zr-BCl3-H2-Ar reagents

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 337, 15 March 2018, Pages 209-216

Yan Zhu, Laifei Cheng, Baisheng Ma, Yongsheng Liu, Litong Zhang,