کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
8025090 | 1517576 | 2016 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Surface oxidation of multicrystalline silicon using atmospheric pressure plasma jet driven by radio frequency of 2.0Â MHz
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Surface oxidation of multicrystalline silicon using atmospheric pressure plasma jet driven by radio frequency of 2.0Â MHz Surface oxidation of multicrystalline silicon using atmospheric pressure plasma jet driven by radio frequency of 2.0Â MHz](/preview/png/8025090.png)
چکیده انگلیسی
Atmospheric pressure plasma jet (APPJ) has a potential interest for solar cell industrial applications. In this study, an APPJ driven by 2.0Â MHz radio frequency was developed for surface oxidation of multicrystalline silicon (mc-Si) to solve potential induced degradation of Si-modules solar cell. Waveforms of current and voltage were recorded, optical emission spectrum of APPJ was analyzed, and the properties of the treated mc-Si were characterized as well. Ar/O2 mixture plasma jet will enhance the mc-Si surface oxidation due to generation of abundant active radials, such as O and OH, as well as rather high plasma temperature. Contact angle of mc-Si surface shows a transition of infiltration properties from hydrophobic to hydrophilic after a few seconds plasma treatment. Measurements from X-ray photoelectron spectroscopy and high resolution transmission electron microscopy confirm the formation of compact silicon oxides on the mc-Si surface, which causes an increase in carrier lifetimes of mc-Si.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 304, 25 October 2016, Pages 537-541
Journal: Surface and Coatings Technology - Volume 304, 25 October 2016, Pages 537-541
نویسندگان
ChengShuang Tang, Yu Yang, Tao Wang, Jun Wang, YiQing Yu, Yu Xin,