Nanoscale Cu/Ta multilayer deposition by co-sputtering on a rotating substrate. Empirical model and experiment

Nanoscale Cu/Ta multilayer deposition by co-sputtering on a rotating substrate. Empirical model and experiment

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 302, 25 September 2016, Pages 284-292

Claudia M. Müller, Alla S. Sologubenko, Stephan S.A. Gerstl, Martin J. Süess, Diana Courty, Ralph Spolenak,