کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
8026693 | 1517609 | 2015 | 15 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
A study of chemical products formed on sapphire (0001) during chemical-mechanical polishing
ترجمه فارسی عنوان
مطالعه محصولات شیمیایی شکل گرفته در یاقوت کبود (0001) در طی جراحی شیمیایی و مکانیکی
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
چکیده انگلیسی
A study of chemical products formed on sapphire (0001) during chemical-mechanical polishing is presented. The results demonstrated that the formation and removal of chemical products both proceeded from the hexagonal close-packed sapphire Al-O layers described as atomic terraces, and the material removal rule of sapphire (0001) during chemical-mechanical polishing is the regular removal of chemical products formed from the atomic terraces, which were successfully characterized by AFM with super-sharp scanning probes. Besides, we also found that the surface with screw dislocations could not be polished completely by CMP due to the crystal distortion energy, and a hard polishing pad could remove scratches more effectively than a soft one
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 270, 25 May 2015, Pages 206-220
Journal: Surface and Coatings Technology - Volume 270, 25 May 2015, Pages 206-220
نویسندگان
Xiaolei Shi, Guoshun Pan, Yan Zhou, Li Xu, Chunli Zou, Hua Gong,