کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
8027085 1517619 2014 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Simulation of linear magnetron discharges in 2D and 3D
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Simulation of linear magnetron discharges in 2D and 3D
چکیده انگلیسی
In spite of being an established thin film coating technology for more than two decades, magnetron sputtering is still a subject of many interesting research activities with respect to its process and plasma discharge dynamics. While the magnetically confined magnetron discharge apparently forms an almost homogeneous plasma torus at the sputter target, recent investigations of high density magnetron discharges by high speed photography reveal that it actually consists of one or multiple propagating plasma waves. With circulation frequencies of several 10 kHz, these features are usually not discerned in practical magnetron sputtering setups; however they should play a significant role in the electron and ion transport dynamics influencing both, the current-voltage characteristics and/or the resulting ion energy distribution function. In order to analyze this in more detail, a minimalist 2D magnetron discharge model with periodic boundary conditions is compared with its 3D equivalent via the Particle-in-Cell Monte-Carlo simulation method. Propagating plasma waves are obviously only possible in 3D models, while the 2D model represents the “ideal” homogenous plasma torus. Thus, by comparing both models with equivalent power density, the impact of the plasma waves on the electric transport properties of the plasma can be analyzed.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 260, 15 December 2014, Pages 411-416
نویسندگان
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