کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
8029886 1517650 2013 15 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Effect of Ar:N2 ratio on structure and properties of Ni-TiN nanocomposite thin films processed by reactive RF/DC magnetron sputtering
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Effect of Ar:N2 ratio on structure and properties of Ni-TiN nanocomposite thin films processed by reactive RF/DC magnetron sputtering
چکیده انگلیسی
Thin films of Ni-TiN nanocomposites have been deposited on Si (100) substrate at Ar:N2 = 1:1, 1:2 or 1:3 at ambient temperature by reactive co-sputtering of Ti and Ni targets used as RF and DC sources, respectively. X-ray diffraction (XRD) studies have shown <111> and <200> as preferred orientations for Ni and TiN, respectively. X-ray photoelectron spectroscopic examination of the films has shown Ti/N to be ≈ 1 for Ar:N2 = 1:2, and < or > 1 for Ar:N2 = 1:1 or 1:3, respectively. Scanning and transmission electron microscopic studies have shown that with an increase in Ar:N2 from 1:1 to 1:3, both porosity content and grain sizes are reduced, while the TiN volume fraction obtained by Rietveld analysis of XRD peaks is increased from 22 to 44%. The magnitude of compressive residual stress in both Ni and TiN phases is found to increase with the decrease in Ar:N2 ratio. Nanoindentation studies have shown that hardness and elastic moduli of films increase with TiN content closely following the rule of mixtures, whereas the scratch resistance scales with hardness. Furthermore, resistivity measured by Van der Pauw four-point probe method appears to be proportional to the TiN volume fraction.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 228, 15 August 2013, Pages 100-114
نویسندگان
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