Effect of hydrogen addition on the residual stress of B-C-N films with cubic boron nitride phase prepared by r.f. magnetron sputtering of a B4C target

► Effect of hydrogen on the residual stress developed in B-C-N film is investigated. ► Compositionally graded B-C-N interlayer and hBN/cBN phases compose the B-C-N film. ► Hydrogen drastically reduced the compressive residual stress of the B-C-N film. ► cBN content in the B-C-N film is slightly changed by the addition of hydrogen. ► Hydrogen inhibits the ability of Ar ions to penetrate into the space of B-C-N film.