Ternary and quarternary TiSiN and TiSiCN nanocomposite coatings obtained by Chemical Vapor Deposition

► TiSiN and TiSiCN nanocomposite coatings were synthesized by CVD. ► New LPCVD processes at moderate temperatures were applied. ► Coatings show high hardness of 3700 HV[0.01] for TiSiN and 4100 HV[0.01] for TiSiCN. ► TiSiCN shows a high oxidation resistance up to 900 °C.